| 摘要 |
When incident light is incident to a photodetector, photoelectrons are emitted therefrom and then multiplied to output an electric current signal. This current signal is integrated over a predetermined period of time in an integrator to be converted to a voltage signal. This voltage signal is converted to a digital signal by an AD converter. This digital signal is supplied to a histogramming memory, which generates a pulse height distribution of voltage signal. Based on a pulse height distribution N(h) generated with incidence of measurement-object light to the photodetector, a pulse height distribution of single photoelectron events p1(h) generated by a generator of pulse height distribution of single photoelectron events, and pulse height distributions of k-photoelectron events pk(h) (k=2, 3, . . . ) calculated and generated in a generator of pulse height distributions of k-photoelectron events, an estimating unit estimates a distribution of numbers of photoelectrons emitted with incidence of the measurement-object light to the photodetector, and thereby obtains the intensity of the measurement-object light.
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