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发明名称
FORMATION OF TUNGSTEN FILM
摘要
申请公布号
JPH1032248(A)
申请公布日期
1998.02.03
申请号
JP19960202973
申请日期
1996.07.12
申请人
YAMAHA CORP
发明人
KUWAJIMA TETSUYA
分类号
H01L21/285;H01L21/28;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/285
代理机构
代理人
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地址
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