发明名称 PRODUCTION OF QUINONEDIAZIDOSULFONIC ESTER SENSITIZER
摘要 PROBLEM TO BE SOLVED: To obtain quinonediazidosulfonic ester free from residue of quinonediazidosulfonyl chloride as starting material and a by-product such as a decomposed product by carrying out specified processes when an arom. polyhydroxy compd. and quinonediazidosulfonyl chloride are condensed using a deoxidizer. SOLUTION: When an arom. polyhydroxy compd. having a mol.wt. of <=1,000 and 1-10 phenolic hydroxyl groups and quinonediazidosulfonyl chloride are condensed using an aliphatic or arom. amine as a deoxidizer, the deoxidizer is dropped into a mixed soln. contg. the polyhydroxy compd. and quinonediazidosulfonyl chloride by a stoichiometric amt. 1.00 times that of the quinonediazidosulfonyl chloride and an acid is added by a stoichiometric amt. 0.10-0.20 times that of the quinonediazidosulfonyl chloride. A pH adjusting agent is further dropped by a stoichiometric amt. 0.11-0.21 times that of the quinonediazidosulfonyl chloride. The amt. of the pH adjusting agent is made larger than that of the acid.
申请公布号 JPH1031306(A) 申请公布日期 1998.02.03
申请号 JP19960189383 申请日期 1996.07.18
申请人 FUJI PHOTO FILM CO LTD 发明人 SATO KENICHIRO
分类号 G03F7/022;H01L21/027;(IPC1-7):G03F7/022 主分类号 G03F7/022
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