发明名称 |
A pad and roller assembly |
摘要 |
<p>A cleaning pad and roller assembly for cleaning semiconductor wafers. The pad may be a felt sheet with a pair of tabs located at opposite ends. The roller may be polyvinylchloride and may have a drive gear at one end and a clamp at each end. Each clamp is a clamping lever mounted on a shelf and may be locked in place by a clamping screw. Each clamping lever may have a pivot at one end and a serrated surface at an opposite end. The clamping screw may pass through the clamping lever into the shelf. <IMAGE></p> |
申请公布号 |
EP0821402(A2) |
申请公布日期 |
1998.01.28 |
申请号 |
EP19970304741 |
申请日期 |
1997.07.01 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
STEVENS JR., LEONARD CORBETT |
分类号 |
B08B1/04;B05C1/02;B08B1/02;H01L21/00;H01L21/304;(IPC1-7):H01L21/00;B08B11/00 |
主分类号 |
B08B1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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