发明名称 |
Process and apparatus for controlling the growth of a crystal |
摘要 |
<p>The invention concerns a process and an apparatus for controlling the growth of a crystal, which growth is governed by a set of measurable and non-measurable variables. The process comprises the following steps: establishing an on-line simulation software working with a reduced number of variables, the reduction of variables being performed by using a projection algorithm; speeding up the on-line simulation software by generating data banks in which values of off-line precalculated variables are stored; tuning the on-line simulation software by adjusting the results predicted by on-line simulations to the results obtained by off-line simulations and by measurements; and establishing a control loop and controlling at least one of the variables in real time, the control loop using the speeded up and tuned on-line simulation software as an on-line observer.</p> |
申请公布号 |
EP0821082(A1) |
申请公布日期 |
1998.01.28 |
申请号 |
EP19960110356 |
申请日期 |
1996.06.27 |
申请人 |
WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AKTIENGESELLSCHAFT |
发明人 |
DORNBERGER, ERICH;VON AMMON, WILFRIED;OELKRUG, HANS;WASMEIER, FRANZ |
分类号 |
C30B11/00;C30B13/28;C30B15/20;C30B29/06;C30B35/00;(IPC1-7):C30B15/20 |
主分类号 |
C30B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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