| 摘要 |
<p>An apparatus for manufacturing a phosphor for use in an electroluminescent panel includes a storage body that is permeable to a fluid, and an open boat for containing a phosphor material. The open boat is stored in, and has a shape corresponding to, the storage body. The open boat and the storage body are housed in a reactor. A gas supply section introduces a nitrogen gas and a halogen gas into the reactor, and a heating device heats the reactor. A pressure control device selectively evacuates the reactor and introduces a gas pressure into the reactor to control the pressure in the reactor to be in a range from 10-3 to 1140 Torr. The pressure control device includes a pressure sensor for detecting the amount of pressure in the reactor, a pressure control valve for setting pressure in the reactor to a predetermined level based on a signal from the pressure sensor, a vacuum pump for discharging a fluid from the reactor until a predetermined amount of vacuum is generated in the reactor, and valves for changing a discharge line. A discharge gas processing device processes toxic gas discharged from the reactor.</p> |
