发明名称 |
Magnetic neutral line discharged plasma type surface cleaning apparatus |
摘要 |
A surface cleaning apparatus using magnetic neutral line discharged plasma for the purpose of inner-wall surface cleaning of a vacuum vessel assembled in a semiconductor manufacturing machine, which comprises electromagnetic coils for producing a closed magnetic neutral line that is formed by circularly connecting points of zero-intensity magnetic field, rf electric field generator for continuously generating plasma by applying a rf electric field along the magnetic neutral line and a controllor for controlling the size and position of the closed magnetic neutral line and the kind, temperature and density of the plasma being generated. <IMAGE> |
申请公布号 |
EP0807951(A3) |
申请公布日期 |
1998.01.28 |
申请号 |
EP19970107305 |
申请日期 |
1997.05.02 |
申请人 |
NIHON SHINKU GIJUTSU KABUSHIKI KAISHA |
发明人 |
CHEN, WEI;SUNADA, TAKESHI;ITOH, MASAHIRO;FUJIMOTO, HIDEKI;UCHIDA, TAIJIRO |
分类号 |
H05H1/46;C23C14/00;C23C16/44;C23C16/50;C23F4/00;C23G5/00;H01J37/32;H01L21/304 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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