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发明名称
摘要
申请公布号
JP2705550(B2)
申请公布日期
1998.01.28
申请号
JP19930331175
申请日期
1993.12.27
申请人
发明人
分类号
H01L21/8238;H01L27/092;H01L29/78;H01L29/786;(IPC1-7):H01L29/786;H01L21/823
主分类号
H01L21/8238
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