| 摘要 |
PROBLEM TO BE SOLVED: To perform the instantaneous detection of the damage accident of a thin plate in the atmosphere such as vacuum and solution by arranging a sounding body at a position, where broken pieces flying by the damage of the thin plate readily collide, and sensing the vibration caused by the collision by an ultrasonic sensor. SOLUTION: Damage detectors 2 are constituted of the same material by bending transparent quartz glass rods with suitable thicknesses is crank shapes for a sounding body and a sound guide. Furthermore, ultrasonic sensors 5 having the sensitivity characteristics of 200 kilocycles are compressed to the edge of the sound guide through the buffer material by a thin rubber plate. The mechanical signal caused by damage from the sounding body is converted into the electric signal. Then, the damage detectors 2 are arranged in a plurality of processing wells 9, which are assembled in a thin-film processing device 1. The respective outputs are connected to an operation controller 8. In the operation controller 8, processing conditions, which are adopted when the damage accident of the thin plate occurs in correspondence with the respective processing contents of the processing wells 9, are inputted. Thus, the processing of the thin film in the processing well, wherein the accident occurs, is controlled. |
