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发明名称
TARGET FOR SPUTTERING AND ITS PRODUCTION
摘要
申请公布号
JPH1025571(A)
申请公布日期
1998.01.27
申请号
JP19960179354
申请日期
1996.07.09
申请人
SONY CORP
发明人
HASHIMOTO KEIJI
分类号
C23C14/34;C23C14/54;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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