| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method, for a diaphragm-type accelerometer, in which a silicon element and a weight glass are aligned with high accuracy so as to prevent their dislocation after their alignment and in which both can be bonded with high accuracy. SOLUTION: In a manufacturing method, a silicon element in which a diaphragm part is formed and a weight glass are aligned so as to be bonded, and a diaphragm-type accelerometer is assembled. In this case, a mark 41 for alignment is formed, by an anisotropic etching operation, in the central part of the silicon element, a mark 42 for alignment is formed, by a sandblast operation, in the weight glass, both are matched by observation under a microscope, and the silicon element and the weight glass are aligned. After that, both are fixed and bonded mutually by an elastic member. |
