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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH1025568(A)
申请公布日期
1998.01.27
申请号
JP19960180578
申请日期
1996.07.10
申请人
SONY CORP
发明人
OTSUKI HIROSHI
分类号
C23C14/34;G11B7/26;G11B11/10;G11B11/105;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
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地址
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