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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH1027904(A)
申请公布日期
1998.01.27
申请号
JP19960182520
申请日期
1996.07.11
申请人
SEIKO EPSON CORP
发明人
OBA KAZUYUKI
分类号
H01L21/28;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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