MASS SPECTROMETER FOR GAS ANALYSIS

摘要

FIELD: ecology, metallurgy, medicine, mass spectrometry, instrumentation engineering and other fields of science and technology where processes related to liberation of gases take place. SUBSTANCE: given mass spectrometer includes chamber of mass analyzer with ionization source, source of ions and detector, gas bleeding-in system and oil-free evacuation system. Source of ions is placed into separate chamber connected to gas bleeding-in system having window for ionizing flux and unit for output of ions made in the form of not more than two windows and/or branch pipes which dimensions satisfy relations: , Ui(x) = Sp(x)N, , where A1@sw,A2@sw,Aowis are areas of section of windows or cross-sections of branch pipes of chamber of source of ions and output window of source of ions correspondingly; Ui(x) is gas x capacity of units of chamber of source of ions; Sp(x) is gas x rate of evacuation of pump of evacuation system; N is coefficient of increase of authenticity of analysis; Vma is volume of chamber of mass analyzer; Vis is volume of chamber of source of ions. EFFECT: expanded application field, increased authenticity of gas analysis. 1 dwgk