Synthesis of pure disilicon hexafluoride

摘要

Highly pure disilicon hexafluoride is synthesized by a process in which a suspension of a fluorination agent is made by dispersing this fluorination agent in an oxybenzene compound as a solvent and disilicon hexachloride is dripped in the suspension to be caused to react with the fluorination agent in nitrogen gas flows under atmospheric pressure, the oxybenzene being expressed by a following formula: <IMAGE> (where each of R1 and R2 is an alkyl group alternatively having one or more substituents; carbon numbers summed up by R1 and R2 are equal to at least 2; and m>/=1 and n>/=0).