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发明名称
ION RADIATION DEVICE
摘要
申请公布号
JPH1027565(A)
申请公布日期
1998.01.27
申请号
JP19960202882
申请日期
1996.07.11
申请人
NISSIN ELECTRIC CO LTD
发明人
NAITO KATSUO
分类号
H01J37/141;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/141
代理机构
代理人
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地址
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