| 摘要 |
PROBLEM TO BE SOLVED: To improve the yield and reliability of products consisting of precision electronic parts, such as semiconductors and liquid crystal display panels, by averting the degradation in the removability of resists and the problems of article contamination arising in the separator of a tacky adhesive tape for removing the resists in the resist removing stage of a production process for the precision electronic parts. SOLUTION: The tacky adhesive tape 1 for removing the resists is constituted by forming a tacky adhesive layer 12 on a base film 11 and sticking a tacky adhesive surface protective film consisting of a polyolefin resin thereon as the separator 13. After the tacky adhesive surface protective film 13 is stripped, the tacky adhesive tape 1 for removing the resists described above is stuck to the articles on which the resists exist in the production process for the precision electronic parts, such as semiconductor wafers and liquid crystal display panels, and thereafter, this tape is peeled, by which the resists are fixed to the tacky adhesive layer 12 surface of the tacky adhesive tape 1 and are thereby removed. |
