FABRICATION PROCESS FOR DEVICE HAVING THIN LAYER OF COBALT SILICIDE,申请号JP19970085442-传众专利搜索

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发明名称	FABRICATION PROCESS FOR DEVICE HAVING THIN LAYER OF COBALT SILICIDE
摘要
申请公布号	JPH1027908(A)	申请公布日期	1998.01.27
申请号	JP19970085442	申请日期	1997.04.04
申请人	LUCENT TECHNOL INC	发明人	TUNG RAYMOND TZUTSE
分类号	H01L21/28;H01L21/225;H01L21/285;H01L21/336;H01L29/78;(IPC1-7):H01L29/78	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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