CHARGED CORPUSCULAR BEAM TRANSFER DEVICE,申请号JP19960182049-传众专利搜索

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发明名称	CHARGED CORPUSCULAR BEAM TRANSFER DEVICE
摘要
申请公布号	JPH1027744(A)	申请公布日期	1998.01.27
申请号	JP19960182049	申请日期	1996.07.11
申请人	NIKON CORP	发明人	OKINO TERUAKI
分类号	H01J37/305;H01L21/027;(IPC1-7):H01L21/027	主分类号	H01J37/305
代理机构		代理人
主权项
地址

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