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发明名称
CAPACITANCE TYPE PRESSURE SENSOR
摘要
申请公布号
JPH1022512(A)
申请公布日期
1998.01.23
申请号
JP19960171181
申请日期
1996.07.01
申请人
TOKIN CORP
发明人
TSURUGA KIKUO
分类号
G01L9/12;G01L9/00;H01L29/84;(IPC1-7):H01L29/84
主分类号
G01L9/12
代理机构
代理人
主权项
地址
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