| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a basket for cleaning a semiconductor wafer in which a semiconductor wafer or a semiconductor chip fallen from a slice table is received and held as it is until it is stripped off from the slice table in the cleaning process. SOLUTION: Two side walls 21, 22 are stood and two side holding rods 31, 32 are disposed horizontally between them. A bottom holding rod 33 is disposed between the lower part of the side walls 21, 22. Clamping rods 52 are held, at the end parts 51a, 51b, 52a, 52b thereof, by the side holding rods 31, 32. A semiconductor wafer is clamped by moving clamping rods 51, 52 horizontally along the side holding rods 31, 32.</p> |
