| 摘要 |
PROBLEM TO BE SOLVED: To provide a line thickness measuring device with which the line thickness at an arbitrary height of a sample is measured. SOLUTION: By taking an image information of a pattern 11 of a sample from an image-pickup part 13 into an image processing part 14, if the cross section of the pattern is torapezoidal, line thickness data L1 and L2 are obtained from the interval between outer most edges of the pattern 11 and that between inner most edges. Assuming a parameter T as an arbitrary value 0-100 base on the line thickness data L1 and L2, a line thickness L at an arbitrary position is calculated and outputted from L=L1+(L2-L1)×(T/100).
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