| 摘要 |
PROBLEM TO BE SOLVED: To provide a length measuring method wherein measurement error due to heat is reduced and a position measurement device using it. SOLUTION: The temperature of a sample object 14 is detected, and based on the detected temperature, displacement amountsΔX andΔY of reflection surfaces of reflection members 24 and 26 against the sample object 14 is obtained. Then, based on the obtained displacement amountsΔX andΔY, a pre-measured positions LX and LY of the sample object 14 are corrected.
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