WAFER CONVEYER

摘要

PROBLEM TO BE SOLVED: To provide a wafer conveyer capable of cleaning contact support members and support block separately. SOLUTION: The conveyer mounts wafers 9 on a support means composed of contact support members for contacting and supporting the wafers 9 and support block 22 which removably fixes the wafer support members 9 through leaf springs 23 having holes at mid-sections. The support block 22 has grooves G. The upper portion of the side face G5 of each groove G is inclined to the support member 21. The leaf spring 23 is fitted into the groove G in the form of an upward convex so that the top end of the support member 21 protrudes from the center opening of the spring 23 to thereby removably fix the support member 21. This allows the support members 21 to be separated from the support block 22 whereby they can be washed in suited conditions to the working conditions and material and the maintenance cost of the conveyer can be reduced.