| 摘要 |
PROBLEM TO BE SOLVED: To provide the image pickup device which can sharply pick up an image of an electronic component, etc. SOLUTION: The image pickup device is equipped with a reflecting means 15 having a reflecting surface 18 which reflects reflected light from an object E when the object E is arranged at an image pickup position P and an image pickup means which picks up an image of the object E by photodetecting the reflected light. Further, the device is equipped with a light quantity splitting part 18a which is provided at part of the reflecting surface 18 of the reflecting means 15 and transmits and reflects incident light, and a light source 19 for coaxial downward illumination which aligns the axis A1 connecting the image pickup position P and light quantity splitting part 18a with a projection optical axis A5 passing the light quantity splitting part 18a and irradiates the object E with the projection light passing through the light quantity splitting part 18a. |
