| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent current changes of nonlinear resistance elements to be provided in between a signal electrode and display electrodes by allowing nonlinear resistance elements to have different nonlinear resistance layers. SOLUTION: A signal electrode 2 and a first lower part electrode 3 and a second lower part electrode 4 to be connected to the signal electrode 2 are provided on a substrate 1. A tantalum oxide film is provided on the first lower part electrode 3 as a first nonlinear resistance layer 5. The tantalum oxide film including nitrogen as an impurity ion is provided on the second lower part electrode 4 as a second nonlinear resistance layer 6. A first upper part electrode 10 to be connected to a first display electrode 8 is provided on the first nonlinear resistance layer 5. A first nonlinear resistance element 12 is constituted of the first lower part electrode 3, the first nonlinear resistance layer 5 and the first upper part electrode 10. A second upper part electrode 11 to be connected to a second display electrode 9 is provided on the second nonlinear resistance layer 6. A second nonlinear resistance element 13 is constituted of the second lower part electrode 4, the second nonlinear resistance layer 6 and the second upper part electrode 11.</p> |
