| 摘要 |
PROBLEM TO BE SOLVED: To enhance resolution and sensitivity and to restrain the occurrence of stationary wave effects and halation by incorporating a specified alkali- soluble resin and a specified phenolic compound and the like. SOLUTION: The radiation sensitive resin composition contains the alkali- soluble resin and a 1,2-quinonediazido compound and the phenolic compound represented by the formula in which each of X1 -X10 is, independently, an H or halogen atom, or alkyl, alkoxy, nitro, cyano, or hydroxy group; each of R1 and R2 is, independently, an H or halogen atom or an alkyl or nitro group; and Y is a simple bond or an O or S atom or a carbonyl, methylene, propylidene, or hexafluoropropylidene group. The alkali-soluble resin can be embodied by novolak resins and polyvinylphenol or its derivatives and the like. |
