MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19960172017-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH1022383(A)	申请公布日期	1998.01.23
申请号	JP19960172017	申请日期	1996.07.02
申请人	MATSUSHITA ELECTRON CORP	发明人	KANBARA GINJIRO
分类号	H01L21/31;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01L21/768	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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