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发明名称
GASÄTZUNG VON SUBSTRATEN FÜR ENTFERNUNG VON OXIDSCHICHTEN
摘要
申请公布号
DE69031370(T2)
申请公布日期
1998.01.22
申请号
DE19906031370T
申请日期
1990.02.12
申请人
FSI INTERNATIONAL, INC., CHASKA, MINN., US
发明人
SYVERSON, DANIEL, J., ROBBINSDALE, MN 55422, US;NOVAK, RICHARD, E., PLYMOUTH, MN 55447, US;HAAK, EUGENE, L., PLYMOUTH, MN 55441, US
分类号
H01L21/311;(IPC1-7):H01L21/311
主分类号
H01L21/311
代理机构
代理人
主权项
地址
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