| 摘要 |
<p>A semiconductor processing system (11) for wafers (80) or other semiconductor articles. The system (11) uses an interface section (14) at an end of the machine accessible from the clean room. A plurality of processing stations (202) are arranged away from the clean room interface (14). A transfer subsystem (800) removes wafers (80) from supporting carriers (79), and positions both the wafers (80) and carriers (79) onto a carrousel (720) which is used as an inventory storage. Wafers (80) are shuttled between the inventory (720) and processing stations (202) by a robotic conveyor (15) which is oriented to move toward and away from the interface end (14). The system (11) processes the wafers (80) without wafer carriers (73) being loaded into the processing stations (202).</p> |
