| 发明名称 |
COATINGS FOR SIMULTANEOUS CONTROL OF TRIBOLOGICAL AND OPTICAL PROPERTIES OF INTERFEROMETRIC REFERENCE SURFACES |
| 摘要 |
A coated transparent interferometric reference (34) for an optical tester (10). In accordance with one aspect of the present invention, the coated reference surface (34) provides improved tribological and optical properties as would be desirable for a disk (16) in an interferometric flying height tester (10).
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| 申请公布号 |
WO9802715(A1) |
申请公布日期 |
1998.01.22 |
| 申请号 |
WO1997US12095 |
申请日期 |
1997.07.11 |
| 申请人 |
PHASE METRICS |
发明人 |
MACHCHA, ASHOK, R.;LUE, KOK;WOMACK, KENNETH, H.;BREZOCZKY, BLASIUS;ABRAHAM, DANIEL, L. |
| 分类号 |
G01B11/14;(IPC1-7):G01B9/02 |
主分类号 |
G01B11/14 |
| 代理机构 |
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