申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
KUBOTA, TOHRU, SHIN-ETSU CHEMICAL CO.,LTD., NAKAKUBIKI-GUN, NIIGATA 942, JP;ISHIHARA, TOSHINOBU, SHIN-ETSU CHEMICAL CO.,LTD., NAKAKUBIKI-GUN, NIIGATA 942, JP;ENDO, MIKIO, SHIN-ETSU CHEMICAL CO.,LTD., NAKAKUBIKI-GUN, NIIGATA 942, JP |