Micro-fluid pivotal actuator for microoptics and microelectronics, e.g. microrobotics

摘要

The actuator operates in the sub-millimetre range and has a hydraulic or pneumatic drive for two movable components (1,2), e.g. two arms connected via a hinge (3) about a pivotal axis in the micrometre scale. The two opposing sides (4,5) of the components define an expandable cavity (8) with variable volume. The pivotal axis of the hinge is aligned perpendicular or inclined to the middle axis of the components and lies staggered, next to the cavity. The cavity and the hinge lie inside a hinge capsule (11) which provides a boundary and a seal. The cavity is connected to at least one fluid channel (10) which can be actuated and thus expanded through a hydraulic or pneumatic pressure device.