TWO STAGE VALVE FOR SMIF PODS

摘要

A valve (40) mounted in a pod door of a SMIF pod (20) for allowing gas flow to and from the sealed pod (20) while the pod (20) is seated on a SMIF port. The valve (40) is provided to allow fluid flow to or from the pod (20) upon the valve (40) being actuated by either a standard registration pin or a specially adapted fluid flow pin (68) intended for use with the present invention.