发明名称 METHOD AND DEVICE FOR MEASURING THE THICKNESS OF OPAQUE AND TRANSPARENT FILMS
摘要 <p>A method for determining the thickness of a thin sample is described. The method includes the step of exciting time dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the samples surface by acoustic waveguide modes (152). The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes (154). The thickness of thin sample is determined by the phase velocities or frequencies to the phase velocities or frequencies calculated from mathematical models (156).</p>
申请公布号 WO1998003044(A1) 申请公布日期 1998.01.22
申请号 US1997012134 申请日期 1997.07.14
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