METHOD AND DEVICE FOR CONTROLLING THE ENERGY OF AT LEAST ONE CHARGED SPECIES BOMBARDING A BODY IMMERSED IN A PLASMA,申请号EP19960912076-传众专利搜索

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发明名称	METHOD AND DEVICE FOR CONTROLLING THE ENERGY OF AT LEAST ONE CHARGED SPECIES BOMBARDING A BODY IMMERSED IN A PLASMA
摘要
申请公布号	EP0819314(A1)	申请公布日期	1998.01.21
申请号	EP19960912076	申请日期	1996.04.05
申请人	CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)	发明人	PELLETIER, JACQUES, H.;LAGARDE, THIERRY, L.;ARNAL, YVES, A.;BURKE, RUDOLF, R.;COCAGNE, JACQUES, R.;DEVINE, RODERICK, A.
分类号	H05H1/46;H01J37/317;H01J37/32;H01L21/203;H01L21/265;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32	主分类号	H05H1/46
代理机构		代理人
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地址

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