| 摘要 |
PROBLEM TO BE SOLVED: To enable the manufacturing of a long ink jet recording head capable of recording an image at high accuracy and high recording speed by forming the upper layer directly connected to a heating resistor and ink of a heat storage layer between a support and a heating resistance layer which constitute a heating element substrate, using a silicon oxide layer formed as film by bias sputtering process. SOLUTION: In an ink jet recording head which discharges ink in the form of bubble using thermal energy generated by energization, a heat storage layer is provided between a support 1 and a heating resistance layer 3 which constitute a heating element substrate 7. This heat storage layer has an upper layer 2b in contact directly with a heating resistor and the ink, and this upper layer 2b is made in a silicon oxide layer which is formed as film using bias sputtering process and shows superior chemical and hot droplet stability at high temperatures. In addition, the heating resistance layer 3 is formed so that its heating part has an insulating protective layer obtained by qualitatively modifying a material itself which forms the heating resistance layer 3. Besides, the silicon oxide layer is preferably 0.2-1μm thick.
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