| 摘要 |
PROBLEM TO BE SOLVED: To attain efficient mass production of lumpy polycrystalline silicon with a simple equipment by heating a cylindrical polycrystalline silicon at a specific temp., thereafter rapidly cooling and crushing with a press. SOLUTION: Then the cylindrical polycrystalline silicon (a silicon rod) obtained by a gas phase reaction, e.g. a 100mm diameter and 80mm length sized rod, is crushed, at first the silicon rod 10 is heated at 400-800 deg.C, and the silicon rod 10 taken out from a heat treating equipment is charged into a water bath to rapidly cool it under 100 deg.C. With this process, a lot of fine cracks are generated in the silicon rod 10 and then the silicon rod 10 is crushed with the press. The press is provided with a stationary board 2 erected on a side edge part of one side of a receiving base 1, and a pressure plate 3 driven back and forth in the direction vertical to the surface of the stationary board 2 on the receiving base 1, and the silicon rod 10 is crushed in a lumpy form by allowing the pressure plate 3 to approach the fixing plate 2. |
