发明名称 Measuring slurry particle size during substrate polishing
摘要 A method of sensing a particle in a mixture includes providing (52) the mixture (36) having a particle (29, 30), moving (54) the mixture (36) in a direction, shining (56) a light into a portion of the moving mixture (36), reflecting a portion of the light off of the particle (29, 30) in the moving mixture (36), detecting and measuring (57) the reflected light, and using (58) the measured reflected light to determine a size of the particle (29, 30).
申请公布号 US5710069(A) 申请公布日期 1998.01.20
申请号 US19960703322 申请日期 1996.08.26
申请人 MOTOROLA, INC. 发明人 FARKAS, JANOS;MULLINS, JAMES MICHAEL
分类号 G01N15/14;(IPC1-7):G01N15/14 主分类号 G01N15/14
代理机构 代理人
主权项
地址