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发明名称
FORMING DEVICE
摘要
申请公布号
JPH1015696(A)
申请公布日期
1998.01.20
申请号
JP19960172430
申请日期
1996.07.02
申请人
HITACHI LTD;HITACHI YONEZAWA ELECTRON CO LTD
发明人
TSUCHIDA KIYOSHI
分类号
B30B11/02;H01L21/56;(IPC1-7):B30B11/02
主分类号
B30B11/02
代理机构
代理人
主权项
地址
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