发明名称 |
Method of making a micro-actuator device |
摘要 |
A method of fabricating a semiconductor integrated microactuator device that includes the steps of: bonding or laminating a driving element to a substrate for generating a vertical motion, and coupling a conversion element to the driving element for converting the vertical motion into rotational motion. The method can be effectively used for micro-actuators that utilize Coulomb's force, vibration, and fluid pressure as their driving force. |
申请公布号 |
US5709802(A) |
申请公布日期 |
1998.01.20 |
申请号 |
US19950415821 |
申请日期 |
1995.04.03 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FURUHATA, TOMOTAKE;HIRANO, TOSHIKI |
分类号 |
B23Q1/34;B81B3/00;B81C1/00;H01L41/09;(IPC1-7):B23Q16/00;H02N2/00 |
主分类号 |
B23Q1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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