| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser beam machine capable of machining both sides of a flexible substrate in one process and superior in machining accuracy. SOLUTION: Adjacently to a laser machining part constituted of a machining stage 2, XY stage 25, laser light source 26, etc., provided are a second machining stage 2a, second XY stage 4, second laser light source 5, etc.; a position sensor 6 is installed next to the laser light source 26, measuring the relative position of a flexible substrate 7 against the machining stage 2, so that the machining positional data of the two XY stages are determined by a controller not shown in figure. |
