HOLDING MEMBER OF SUBSTRATE, HOUSING BODY OF SUBSTRATE, METHOD FOR TRANSPORTING SUBSTRATE AND TREATING DEVICE FOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To smoothly hold substrates even if the sizes thereof increase and to house the plural substrates into a cassette. SOLUTION: A holding member 10 composed by a pair of holding members 21, 22 and an energizing member is used and the edges of the glass substrate P are held by the holding parts at the energized front ends. The substrate is then perpendicularly hung down. The holding member 10 itself is detained to bars 46 put on horizontally within the cassette 40. The housing of the glass substrates P in juxtaposition perpendicularly in the cassette 40 is made possible.