| 摘要 |
PROBLEM TO BE SOLVED: To form a hole on a recording head at a predetermined position without displacement at the time of the hole formation by forming the hole by radiating a laser light beam to an area between an electrode portion and a mask portion adjacent to each other on an insulating substrate from one surface side. SOLUTION: On one side surface of an insulating sheet 110 comprising a 25 to 100μm thickness polyimide resin as an insulating substrate, a 1 to 15μm thickness copper foil is formed uniformly by a deposition method. By an etching method, a mask pattern 120 as a mask portion and a control electrode 130 as an electrode portion, which serves as a laser processing mask pattern and an electrically effective pattern, are formed. A slit mask as an optical path regulating member, formed by forming a rectangular slit opening in an extremely thin stainless steel plate, is superimposed on the mask pattern 120 and the control electrode 130 on the insulating sheet 110 and irradiated with an excimer laser beam. Accordingly, a hole can be formed at a predetermined position without positioning.
|
