| 摘要 |
PROBLEM TO BE SOLVED: To enable the manufacturing of a long jet recording head capable of recording an image at high accuracy and high recording speed by forming a heat storage layer between a support and a heating resistance layer which constitute a heating element substrate, using plural layers, i.e., a lower layer which has low film stress and low thermal conductivity and mainly contributes to producing the heat storage effect and an upper layer coming into contact directly with a heating resistor and ink. SOLUTION: In a heating element substrate 7 for this ink jet recording head which discharges ink in the form of bubble using thermal energy generated by energization, a heat storage layer is provided between a support 1 and a heating resistance layer 3 which constitute a heating element substrate 7. This heat storage layer is formed of layers, i.e., a lower layer 2a which shows low film stress and low thermal conductivity and mainly contributes to producing the heat storage effect and an upper layer 2b which shows superior chemical and hot droplet stability at high temperatures and is in contact directly with as heating resistor and the ink. In addition, the heating resistance layer 3 is formed so that its heating part has an insulating projecting layer obtained by qualitatively modifying a material itself which forms the heating resistance layer 3. In this case, the upper layer of the heat storage layer is preferably formed of silicon nitride and is preferably 0.2-1μm thick in terms of film thickness.
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