| 摘要 |
PROBLEM TO BE SOLVED: To prevent short circuit between a movable and fixed comb-like structures and increase the capacity to realize a sensor, without enlarging its size by forming movable oscillation masses for the fixed comb-like structure and dielectric layers therebetween. SOLUTION: Oscillation massive fingers 105, 106, 107 are distant by about 1-2 microns from adjacent comb-like fingers of structures 117, 118 to optimize the sensitivity and size of a sensor 100. In a usual operating condition, a bias of about 1-5V is applied to comb-like fingers 108-113 and oscillation massive fingers 105-107 of the sensor 100, thus functioning as a capacitor plate for measuring the speed changes. Hence the speed change is detected by measuring the capacitance difference between the mass fingers and comb-like fingers. This prevents the short circuit between the movable oscillation massive and fixed comb-like fingers, elevates the sensor sensitivity and increase the structural rigidity. |
