发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device wherein a measurement which cannot be performed in a finished product state can be performed in a wafer state. SOLUTION: A semiconductor device 2 has probe pads 151 -156 , banding pads 11-13 and a thin film wiring, and further, it has a bonding wiring 17 which is a part of the thin film wiring and connected to the probe pad 151 . When an end of a metal wire 18 is fixed to the bonding pad 13, it is fixed to the bonding wiring 17 or the probe pads 151 -156 together. So that, before wire banding, an inspecting probe is made to contact with each bonding pad 11-13 and each probe pad 151 -156 to operate an internal circuit individually, so that an electric test can be performed. On the other hand, at wire bonding, the bonding pads 11-13 can be connected to the probe pads 151 -156 without providing a special process.
申请公布号 JPH1012680(A) 申请公布日期 1998.01.16
申请号 JP19960178619 申请日期 1996.06.19
申请人 SHINDENGEN ELECTRIC MFG CO LTD 发明人 NISHI TOMOAKI;NAKAJIMA ARATA;HIKIMA ISAMU
分类号 H01L21/66;H01L21/60 主分类号 H01L21/66
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