| 摘要 |
PROBLEM TO BE SOLVED: To enable detection of a minute slant of an object of inspection even in the case when the quantity of reflected light from the object is small relatively. SOLUTION: This device has a light source 1, a single-mode channel waveguide 2 for light incidence, a double-mode channel optical waveguide 5 for light emission and reception having an end face 6 for emitting and receiving light at one end, a branch region 4 for distributing the light emitted from the end face 6, reflected on an object 10 of inspection and propagated again through the double-mode channel waveguide 5, channel waveguides 11 and 12 for light distribution and photodetectors 13 and 14, and the double-mode channel waveguide 5 and the two channel waveguides 11 and 12 for light distribution are so designed as to propagate the light of a TE mode and the light of a TM mode, while the single-mode channel waveguide for light incidence is so designed as to propagate only either the light of the TE mode or that of the TM mode. |
