| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide provided with a filter easy to form a groove on a wafer collectively, easy to fix a thin film filter and capable of facilitating handling after fixing. SOLUTION: By burying the thin film filter 13 while being in close contact with an inner wall 14 of a V-shaped groove 12, the thin film filter 13 is not tilted more than that, and a stable slope angle is obtained, and an optical characteristic is stabilized. Further, by burying the thin film filter 13 into the groove 12, the matter that the thin film filter 13 is not protruded from an optical waveguide element 10, and the handling is facilitated. |
