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发明名称
ASHING TREATMENT METHOD
摘要
申请公布号
JPH1012595(A)
申请公布日期
1998.01.16
申请号
JP19960159509
申请日期
1996.06.20
申请人
HITACHI LTD;HITACHI TECHNO ENG CO LTD
发明人
FUKUYAMA RYOJI;SATO HITOAKI;KANEKIYO TADAMITSU;TAKEI HIDENORI;FUJIMOTO KOTARO
分类号
H01L21/302;H01L21/027;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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